CLUSTER SYSTEMS

for Research, Develop­ment & Production

The cluster systems CS200 and CS300 are modular coating systems suitable for highly flexible or highly productive processes in the development and production of semiconductor, optics, or photovoltaic applications. They are specifically designed for processing substrates with a diameter of 200 mm or 300 mm (including G12 wafers).

Thus, the VON ARDENNE cluster systems are the ideal choice for the development of new coating technologies and the production of layers with specific properties and high reproducibility. Applications include sensors and silicon through-silicon vias (TSV) for 3D advanced packaging technology in the semiconductor industry. Furthermore, the CS300 is used in the development of new solar cell generations such as TOPCon and perovskite tandem.

Thanks to their great flexibility, VON ARDENNE cluster systems help you reduce your operating costs. The systems can be individually configured for different tasks: up to seven process chambers and one or more load locks can be installed around the central transfer chamber. All chambers are separated from each other both in terms of vacuum technology and control technology.

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