TOPCon Solar Cells

Vacuum Coating Equipment & Expertise

N-type TOPCon so­lar cells of­fer nu­mer­ous ad­van­tages ov­er PERC so­lar cells, such as low­er de­gra­da­tion and high­er ef­fi­cien­cy.

We have fur­ther de­vel­oped the sput­ter­ing tech­no­lo­gies that have proven them­selves in VON ARDENNE sys­tems for the mass pro­duc­tion of het­ero­junc­tion so­lar cells. As a re­sult, we can al­so of­fer coat­ing sys­tems with a ca­pac­i­ty of up to 1.2 gi­ga­watts for cus­tom­ers in the TOPCon mar­ket.

The sput­ter­ing pro­cess al­lows the sin­gle-sid­ed, full-sur­face coat­ing of the so­lar cell rear side with tun­nel ox­ide and a doped amorph­ous sil­i­con lay­er in a high­ly pro­duc­tive in­line pro­cess. The re­sult is a sig­nif­i­cant­ly high­er yield than with con­ven­tion­al PECVD and LPCVD pro­cess­es.

Further­more, with PVD, we can de­po­sit the front- and rear-side SiNx layer in a single system. The com­bi­nation of the two pro­cess steps - TOPCon and SiNx deposited with PVD - leads to a silane- and phos­phine-free pro­duc­tion.