MEMS
Subline

Micro-Electro-Mechanical Systems (MEMS) are tiny devices that combine mechanical and electronic components. They are used in a wide range of applications, including sensors, display technologies and microfluidics.

We offer you flexible vacuum deposition systems for MEMS manufacturing. They enable you  to combine different technologies, such as etching, deposition of metallization, semiconductor and passivation layers, a post-treatment or even customized requirements, depending on the specific application.

Would you like to learn more? Then click on the content below or contact us directly.

Easy adaptation to new processes & requirements

due to flexibly configurable equipment

Floor space is saved

due to compact design

Cost-efficient equipment

due to fully automated concept

Equipment
Perspective view of a VON ARDENNE cluster system.
Cluster Systems for Research, Development & Production Learn more
Technologies
Magnetron Sputtering Key Technology from In-house Development & Manufacturing Learn more
Support

Engineering
Simulation . Sampling . Layout

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Perspective view of a VON ARDENNE sampling and testing equipment.

Technology & Application Center
Sampling . Development . Scaling

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Service
Customer Portal . Spare Parts . Trainings

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Media
Successful kick off: Sustainability Network Dresden meets at VON ARDENNE

On November 22, 2022, VON ARDENNE hosted the first meeting of the Sustainability Network Dresden, which was launched on the initiative of the Dresden…

Digital Solutions for Resource Efficiency in Glass Coating

The recent discussion about climate neutrality and shifting the energy industry towards it is focusing on the development of renewable energy sources.…

Automated process stabilization for glass coating - with VA PROCESSMASTER

In this video, Harald Hagenström, vice president glass, introduces the VA PROCESSMASTER. This tool enables our customers to create complex and…

VON ARDENNE at the AVS 2022 - Key Takeaways

This video provides some insights into the AVS68 in Pittsburgh. Brian Cohen and Daniel Radach from VON ARDENNE North America talk about their…

Coating Equipment for Precision Optical Coatings

A crucial prerequisite for precision optics to function is high-precision coatings that make use of the interference properties and, thereby, provide…

What makes electron-beam assisted PVD coating so special?

The ability to coat a multitude of surfaces with specific materials is extremely important for providing technologies and products for our everyday…

Perovskite PV: Status, Importance and Manufacturing Technologies

Some say that solar energy is the new oil. And perovskite solar cells appear to be the latest technology trend in the industry offering a huge…

What is the most efficient way to melt refractory and reactive metals?

Refractory and reactive metals have extraordinary properties such as resistance to heat, corrosion, and wear. These are extremely interesting…

Magnetron Sputtering: How It Began and How VON ARDENNE Became a Technology Pioneer

What is extremely thin, almost invisible and transforms a piece of glass into a touch screen surface that is easy to clean? Or into a windshield that…

VIDEO: Future Trends in Photovoltaics | Cleantech Conversations

In this first episode of our new series Cleantech Conversations, we have interviewed Jonathan Gifford, Editor in Chief at pv magazine about future…

CONTACT
Trade fairs
30.04.2023 - 04.05.2023
SPIE Defense Orlando 2023

Booth: 1621
Orlando, Gaylord Palms Resort & Convention Center

08.05.2023 - 11.05.2023
SVC Washington 2023

Booth: 420
Washington (DC), Gaylord National Resort & Convention Center

20.06.2023 - 22.06.2023
Sensors Converge Santa Clara 2023

Santa Clara, Convention Center

21.06.2023 - 23.06.2023
VIMF 2023

Booth: 152
Binh Duong, World Trade Center Binh Duong New City

19.09.2023 ä 21.09.2023
V2023

Dresden, Internationales Congress Center

Contact persons
Dr. Frank Hinze

Di­rec­tor Mod­u­lar Process Sys­tems VON ARDENNE GmbH