DAS
Dual Anode Sputtering

Dual Anode Sputtering (DAS) is an industrially proven coating technology. It can be applied for ceramic processes with materials such as niobium oxide (NbOx), titanium oxide (TiOx) or intrinsic tin oxide (i-ZnO), for instance in the display and photovoltaics industry. The DAS method guarantees a good availability of the anode as it is cleaned periodically, even when dielectrics are sputtered.

The DAS technology enables us to proceed from the commonly used AC-MF mode to a DC powering of the process, which reduces the heat load on the substrate considerably. With the application of DAS sputtering with reactive process control, high deposition rates in the transition region can be achieved. This is a distinct improvement, especially for the deposition of silicon dioxide (SiO2) and aluminum oxide (AlOx).

Would you like to learn more? Then take a look at the brochure or contact us directly.

Long uptime - even with insulating layers

due to cyclic cleaning of the anode

Flexible arrangement for your system

due to scalable design

Patented technical solution for innovative operation

and for differentiation from market participants

Software
myVA Online-Kundenportal Learn more
Equipment
Equipment
Perspective view of a VON ARDENNE web coating system.
FOSA CX Web Coating System Learn more
Perspective view of a VON ARDENNE web coating system.
FOSA LabX Web Coating System Learn more
Perspective view of a VON ARDENNE web coating line.
FOSA MX Web Coating System Learn more
Perspective view of a vertical VON ARDENNE glass coating system.
GC120VCR Vertical Coating System Learn more
Perspective view of a horizontal VON ARDENNE glass coating system.
PIA|nova® Glass Coating System Learn more
Perspective view of a VON ARDENNE inline coating line.
XEA|nova® L Inline Coating System Learn more
Media
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Automated process stabilization for glass coating - with VA PROCESSMASTER

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VON ARDENNE at the AVS 2022 - Key Takeaways

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What is the most efficient way to melt refractory and reactive metals?

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Magnetron Sputtering: How It Began and How VON ARDENNE Became a Technology Pioneer

What is extremely thin, almost invisible and transforms a piece of glass into a touch screen surface that is easy to clean? Or into a windshield that…

VIDEO: Future Trends in Photovoltaics | Cleantech Conversations

In this first episode of our new series Cleantech Conversations, we have interviewed Jonathan Gifford, Editor in Chief at pv magazine about future…

CONTACT
Trade fairs
29.03.2023 - 31.03.2023
MECSPE 2023

Booth: 14 / E36
Bologna, BolognaFiere

13.04.2023 - 14.04.2023
nPV Workshop Delft 2023

Delft, Technical University

19.04.2023 - 22.04.2023
TiExpo Baoji 2023

Booth: B / 360
Baoji, Exhibition Center

 

25.04.2023 - 26.04.2023
OptecNet Fürstenfeldbruck 2023

Fürstenfeldbruck, Veranstaltungsforum

30.04.2023 - 04.05.2023
SPIE Defense Orlando 2023

Booth: 1621
Orlando, Gaylord Palms Resort & Convention Center

Contact persons
Ronny Borchel

Product Manager Plasma Components VON ARDENNE GmbH