TOPCon Solar Cells

Vacuum Coating Equipment & Expertise

N‑type TOPCon solar cells provide several advantages over PERC technology, including reduced degradation and higher efficiency.

Building on the sputtering technologies successfully used in our systems for high‑volume heterojunction production, we have advanced these processes for TOPCon manufacturing as well. This enables us to offer coating systems with capacities of up to 1.3 gigawatts for customers in the TOPCon segment.

The sputtering process enables single‑sided, full‑area deposition of the rear‑side tunnel oxide and doped amorphous silicon layers in a highly productive inline setup. This approach delivers significantly higher yields compared with conventional PECVD and LPCVD methods.

In addition, PVD allows both the front‑ and rear‑side SiNx layers to be deposited within one system. Combining these two steps—TOPCon and SiNx deposition via PVD—results in a production process that is completely free of silane and phosphine.