N-type TOPCon solar cells offer numerous advantages over PERC solar cells, such as lower degradation and higher efficiency.
We have further developed the sputtering technologies that have proven themselves in VON ARDENNE systems for the mass production of heterojunction solar cells. As a result, we can also offer coating systems with a capacity of up to 1.3 gigawatts for customers in the TOPCon market.
The sputtering process allows the single-sided, full-surface coating of the solar cell rear side with tunnel oxide and a doped amorphous silicon layer in a highly productive inline process. The result is a significantly higher yield than with conventional PECVD and LPCVD processes.
Furthermore, with PVD, we can deposit the front- and rear-side SiNx layer in a single system. The combination of the two process steps - TOPCon and SiNx deposited with PVD - leads to a silane- and phosphine-free production.
