PiezoMEMS

Advanced Vacuum Deposition Equipment for Metallization

rom smartphones to smartwatches, piezoelectric micro‑electro‑mechanical systems (piezoMEMS) enable the compact, highly responsive sensors that make modern devices intuitive and energy‑efficient. Their exceptional sensitivity and minimal power demand position piezoMEMS as a key technology shaping the next generation of wearables, IoT solutions, and smart environments.

The OPTA X platform delivers exceptionally precise deposition of advanced piezoelectric materials such as AlN and AlScN. These materials are ideally suited for piezoMEMS thanks to their strong mechanical performance, CMOS process compatibility, and long‑term stability. The resulting thin films support the development of highly responsive sensors and actuators by reliably converting mechanical motion into electrical signals—and back again.

Drawing on deep expertise in materials science and thin‑film deposition, VON ARDENNE supports the rapid growth of this emerging field. Our process technology ensures consistent thickness and stoichiometry across 200‑mm and 300‑mm wafers, enabling high throughput and strong yields for volume production.