OPTA X

Rotary Disc Coating System

With the OPTA X, you will get a system for the most demanding optical layer systems. This is especially true for multilayer optics with high numbers of alternating layers as well as emerging materials required for memory, sensor and photonic applications.

The system coats horizontally. The special CARS process technology is used on the OPTA X for optimum coating. However, other process designs such as Meta Mode, reactive or non-reactive sputtering are also available.

Magnetrons and/or plasma sources can be integrated onup to five ports per coating side. In-situ measurement technology for tracking and correcting the coating progress is also available for optical monitoring.

The system has an automatic handling system with a modular design, standard loading interface and software infrastructure to be integrated in cleanrooms.

The OPTA X can be loaded with different substrates, different substrate sizes up to 300 mm wafers or other form factors, which are fed through the system in adaptable carriers.

Different module types can be combined depending on process and productivity requirements. Examples would be multiple magazine locks or pre- and post-treatment chambers.

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