LION
Linear Ion Source

The VON ARDENNE high-performance Linear Ion Source LION® is a component that is suitable for pretreatment and surface modification.

The ion beam of the LION® is strongly focused and highly energetic. Therefore, it is an ideal device for inline coating systems that require physical etching and surface activation using argon, oxygen, and nitrogen.  Due to its simple and robust design, the ion source is easily scalable.

20 years of experience at VON ARDENNE

with more than 60 LION® systems delivered worldwide

Scaling from Lab to Fab

Up to 3.3 m nominal length

Wide range of applications

glass coating, photovoltaics, optics, display technology, fuel cells, sensor technology, R&D

Diverse process capabilities

pre-treatment, layer modification, assist

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CONTACT
02.09.2026 - 04.09.2026
Semicon Taiwan 2026

Taipeh, Taiwan

Silicon Saxony Pavilion

13.10.2026 - 15.10.2026
Semicon West 2026

San Francisco, CA, USA

Moscone Center

North Hall | Booth 5373

SALES Contact

Am Hahnweg 8
01328 Dresden
Germany

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