Electromagnetics Simulations
What?
Modeling of
- Electric coils
- Permanent magnets
- Ferromagnetic materials with non-linear B-H curves and hystereses
- DC and AC processes
- Electrothermic coupling
- Electromagnetic coupling
With What?
- Ansys
- Comsol
- CST/Opera
What For?
- Electric and magnetic fields
- Thermally induced deformation and stress
- Forces and torques from electromagnetic fields
- Skin effects and motion-induced eddy currents
- Magnetization of materials
PLASMA SIMULATION
What?
- Simulation of charge carriers (ions and electrons) under the influence of electric and magnetic fields
- Development of low-pressure plasma in space
With What?
- PICMC
- Opera
What For?
- Influence of chamber geometry and orifices as well as eddy currents on plasma development
- Course of an electron beam under the influence of the magnetic field
- Intensity and distribution of back-scattered electrons of the electron beam
- Optimization of sputter and etch processes