XEANOVA

Inline Coating System

If you are looking for a highly productive and flexible production system combined with proven technology and design, the XEANOVA is the perfect choice.

The inline coating system is based on our patented coating technology for large substrate areas. The large system width allows the simultaneous processing of many substrates. Therefore, it is particularly suitable for applications with high productivity at very low costs. With the XEANOVA, you can coat silicon wafers or other small substrates. It is also suitable for very thin substrates.

Thanks to its modular design, the XEANOVA can be equipped with rotatable magnetrons for the sputter deposition of high performance TCO layers or various other materials such as metals and metal oxides. It can also be adapted for other deposition technologies. Substrates can also be pre-treated in the system by cleaning or etching, either under vacuum or before entering the  vacuum.

Would you like to learn more? Explore the content below or contact us.