OPTA X

Rotary Disc Coating System

With the OPTA X200 and OPTA X300, we offer you highly productive rotary disc coating systems. They are suited both for the most demanding optical coating systems and for the precise deposition of, for example, high-performance piezoelectric materials such as AlN and AlScN. This applies especially to multi-layer optics with a high number of alternating layers and high-quality layer stacks for microelectronic applications and semiconductor systems.

The rotary disc systems coat both sides horizontally and are designed, depending on the model, for processing substrates with diameters of 200 mm or 300 mm (including G12 wafers). For optimal coating, the special CARS technology is used. But other process modes such as Meta Mode, reactive or non-reactive sputtering are also available.

For maximum variability, magnetrons and/or plasma sources can be integrated on up to five ports per coating side. In-situ measurement technology for tracking and correcting the coating progress is also available for optical monitoring.

Both models are equipped with an automatic handling system. This is modularly constructed and enables safe loading with different substrates, which are guided through the system in adaptable carriers.

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