MEMS

Vacuum Deposition Equipment & Solutions for MEMS Manufacturing

Micro‑electro‑mechanical systems (MEMS) are miniature devices that integrate mechanical structures with electronic functionality. They are essential components in a broad range of applications, from sensors and display technologies to microfluidic systems.

Our vacuum deposition platforms provide a flexible and highly configurable solution for MEMS production. They allow you to combine multiple process technologies—including etching, metal and semiconductor deposition, passivation layers, post‑treatments, and other customized steps—tailored precisely to the needs of your application.